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General description :
The intention of the development of the excimer laser series ExciStar XS was to design a compact excimer laser with lowest investment costs, but also with superior performance, which can be used even in industrial applications. These requirements led to an excimer laser with extremely compact size that offers exceptional performance and lifetime characteristics at repetition rates of 200Hz and 500Hz.
ExciStar XS combines a number of Coherent's innovations in excimer laser technology to deliver high reliability, low maintenance downtime and long lifetime. Main features are:
- Extremely compact size
- Available for 157, 193, 248 und 351 nm
- Repetition rates up to 200Hz and 500Hz
- New tube design "Almeta XS"
- Equipped with corona pre-ionization and solid state switching
- Stand-alone or OEM version
- Air cooling, single phase
- Use of premix laser gas
- RoHS compliant
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PSX-100
World's Smallest Excimer Aninnovative multi-gas excimer laser which is both compact and portable and yet is capable of mJ pulse energies and, with a pulse duration of only 2.5 ns, peak powers in excess of 2 MW.
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