|
|
| IKO Cleanroom precision positioning table TC is the most suitable for use in an environment requiring high cleanliness, for example, semiconductor manufacturing equipment and liquid crystal related equipment. Its unique high air-tightness structure seals the driving part and slide table guide part perfectly to prevent dust emission from the table to the surrounding environment. Three types of cleanroom precision positioning tables are available. Slim type TC-US has super cleanliness and compactness with availability of motor holding back type. TC-U has a high rigidity bed with many options and TC-L has a full cover structure that ensures low noise and is excellent in corrosion resistance. |
|
For applications with high loads, particularly torque loads, our AXLT line of linear tables offer outstanding solutions. In order to be able to optimally utilise the potential of the linear motion and drive systems, all sizes are also available with a steel base plate.
The integrated ball screw guarantees accurate sequences of movements even at the highest loads. Two parallel THK linear motion guides ensure that high load torques can be taken up. All internal components such as the screw-type drive, linear motion system and switch are protected against external influences by a bellows available as standard.
Fixing
Depending on installation position and size, the structure of their base plates mean that our linear tables can be screwed tight from below with the sliding block, or from above.
Limit stop
A choice of an internal inductive proximity switch or an externally mounted mechanical limit switch is available as a limit stop. |
|
The ATT185 series precision tilt (pitch-roll) tables provide a means for leveling instruments or tilting components over a ±10° range. Aerotech's patented sub-arc-second resolution drive allows the user to cover the total angular range quickly while maintaining a resolution of 0.2 arc-second for the ATT185-3, and 0.1 arc-second for the ATT185-5. With this unique drive, the tables exhibit virtually no creep or backlash and have excellent repeatability. These tables have a gimbal support with decoupled and orthogonal axial motion.
Both tilt table bases have clearance holes for M6 screws on 25 mm centers and are adaptable to Aerotech linear or rotary translation stages. The tables are constructed of aluminum with a black anodized finish.
|
|
The MVT 40C XYZ has been optimized regarding its flat form and is alternativly available with fine adjustment screws or with micrometers. The backlash is minimized through the spring return.
- for use with SYS 40
- special aluminium alloy for high dimensional stability, black anodized
- mountable on slides and pins
- self-locking
- flat design
- low mass
Positioning systems are the economic solution for applications, where simple but precise motion sequences have to be realized.
Due to the manifold combination possibilities of linear, rotary, angular adjustment and tilt stages, goniometers as well as fine-thread and micrometer screws in the most different specifications, a large application area is covered.
Adapter plates allow additional assembling possibilities. Therefore, a multitude of applications is possible, also beyond the standardized system heights of 40 mm, 65 mm and 105 mm. |
|
| With its new structural shape the HPS-170 is especially developed to meet high positioning demands. Due to its precise and smooth operation this linear stage is perfectly suited for measuring and inspection equipment. All important parts are made of a special, tempered Al-alloy which guarantees a longtime stability. The Precision Stage HPS-170 is available with a DC,- or 2-phase-micro step (SMC-series) motor. Two limit switches are firmly integrated in the precision stage. Optionally the precision stages can be equipped with a linear encoder which guarantees a resolution of 0.1 µm. Optical and inductive limit switches as well as test and calibration certificates can be supplied on request. |
|
Single Bearing Positioning Stage - LSS series
The single bearing positioning stage features lightweight moving parts for higher acceleration of light loads; it is designed for long-stroke closed position loop servo applications.
Extruded Positioning Stage - LSX series
This positioning stage features lightweight moving parts for high acceleration of light loads; it is designed for long-stroke closed position loop servo applications.
Enclosed Positioning Stage - LSE series
The enclosed positioning stage provides high acceleration of heaver loads; it is designed for applications with one or more axes. To provide a variety of forces, the LSE is available with either brushless iron core, cog-free, brushed DC and AC induction motors. Linear X-Y-Z Gantry - LSG series
Baldor's linear gantry stage is designed to speed up and simplify the building of high throughput, precision positioning systems. The LSG provides a clean, very compact design compared to conventional gantry systems base upon rotary components and ballscrews; it is ideal for applications where space is at a premium. |
|
High-Precision Linear Stages LIMES 122
The high-precision linear stages of the LIMES 122 series are characterized by high precision, which is necessary for demanding R&D applications. Due to their suitability for continuous operation, the LIMES linear stages are the appropriate choice for industrial applications as well. The special guides provide backlash-free motion as well as high load capacity. The ball screw is preloaded and ensures high precision movement as well as a high life time. All aluminium parts have a top quality black anodized protective coating.
- series of high-precision linear stages made of high strength aluminium alloy
- travel up to 260 mm
- backlash-free ball screw
- carriage with preloaded recirculating ball bearings
- stainless, ground guides
- high precision limit switches (Hall-effect), mechanical or inductive limit switches
Options
- brake
- linear measuring system (accuracy class ±3 µm/m, resolution 0.1 µm) |
|
Series TLP
Toothed belt or spindle drive linear modules with Outer aluminium roller guid for high dynamical applications up to 5m/s with light and medium loads. Very smooth and silent running.
Consists of:
- Anodized Aluminium body
- External Aluminium roller guide
- Integrated toothed belt
Features:
- Fast and dynamic movements
- Light and compact design
- Cassettes with felt seal
- Strokes up to 3400 mm
- Toothed belt inside aluminium housing with steel cover |
|
POSITIONING TABLE TU IS A SLIM LINEAR SLIDE ACTUATOR THAT INCORPORATES EITHER GROUND OR ROLLED BALL SCREWS IN A U-SHAPED TRACK RAIL.
WITHOUT EXTRA DESIGN WORK, YOU CAN OBTAIN BALL SCREW DRIVEN POSITIONING TABLE WITH STABLE HIGH ACCURACY AND RIGIDITY. |
|
SKF Profile rail guide slides are state-of-the-art tables with high accuracy and high load carrying capacity.
They are available in the following variations:
. ball srew drive or linearmotor drive . four different precision classes . five different sizes
. three different covers to suit the environmental conditions.
Please keep in mind that the preferred range have a delivery time of 2 weeks. |
|
The compound table 1 from isel consists of two linear guides LES 5 that are connected in rectangular way by two ground steel plates. In this basic version, the linear guides have a travel range of 420 mm. The individual axes are driven by a stepping motor and a ball screw drive with a pitch of 5 mm.
In order to reach very high load capacities, each axis is provided with four linear slides.
In addition to this basic version, it is possible to combine all linear guides LES 5 by means of connecting plates for compound tables from isel. You can choose from different travel ranges, pitches and drive motors to assemble an individual compound table.
The face-milled aluminium T-slot plates form isel are available in the widths 250 mm und 375 mm and in the lengths 592 mm, 692 mm, 792 mm and 1,092 mm. The scope of delivery includes the complete fastening material necessary. |
|
D 2
Rotary Axis
play-less timing belt drive with stepping, DC or AC servo motor
reduction 1:40
steel flange Ø 86 mm, 56 ± 3 HRC
A Mounting plate, set 1 (including fastening)
Item no.: 277024
B Mounting plate, set 2 (including fastening)
Item no.: 277024 1000
|
|
With its Ball Rail Tables TKK and TKL, Rexroth offers ready-to-install solutions for linear motion applications with high rigidity requirements. The base plate of the ball rail tables is made from machined aluminum profiles or steel with reference edges. Integrated in this rigid axis are Rexroth ball rail systems with four long runner blocks per carriage. These can be driven
by ball screws (TKK) or linear motors (TKL).
To achieve the most economical solution for each specific application, Rexroth also provides matching side drive timing belts or motor mounts and couplings, as well as various motor-controller combinations. |
|
| Linear Motion Rolling Guide technology nurtured in the company over the years and up-to date micro-electronics technology have been combined in this new series. The Precision Positioning Table incorporates IKO Linear Way Series which is used widely in applications for precision machines and machine tools, and takes full advantage of its superior characteristics. Electronic control devices are specially prepared in series to achieve the best performance of the tables so that a well balanced total system including a drive system and electronic control devices can be completed.IKO Mechatronics Series is expected to serve as indispensable components for automation an unmanned control machines. We will now introduce Mechatronics Products created by our original technology. |
|
For three decades Velmex manual and motorized UniSlide Assemblies have been the preferred method to produce linear and rotational motion in scientific, research, machine, instrument and industrial applications. Hundreds of thousands of UniSlides are in use providing simple, rugged, reliable motion. UniSlide applications are limited only by your imagination. For measurement, alignment, inspection and QA/QC, optical focusing, antenna alignment, film and animation work, medical and biological analysis, for moving probes, sensors, components, and thousands of other uses—if you need precise, versatile movement in one, two or three dimensions, with linear or rotational motion, you can do it more efficiently and less expensively with a Velmex UniSlide.
UniSlides are available in nearly 1000 standard manual or motorized configurations, including free sliding models, screw drive versions, models with micrometer position readout in English or Metric calibrations, rapid advance models, in standard and high precision accuracy. An impressive array of products. But the real versatility of UniSlides is their amazing flexibility. |
|
| The 130 series tables are designed to maximize performance while minimizing physical size and cost. These tables use a low friction, preloaded, recirculating linear ball bearing system, which rides on a single precision ground linear rail. The single linear rail is mounted to a precision machined aluminum base, which offers a rigid support over the entire travel of the table's carriage. The load is mounted to a precision machined aluminum carriage, which has threaded stainless steel inserts for high strength and wear life. There are 30 different acme & ball screw options that offer high efficiencies and long life at an economical price. These tables are designed to allow for numerous options. They include EOT & Home switches, linear & rotary encoders, power-off electric brakes, motor wrap packages, and versatile mounting brackets for multiple axis applications. |
|
Linear tables SLTL-G were studied for the applications which require a very high degree of accuracy of positioning and a high load.
Linear tables SLTL-G are carried out by means of L `assembly of:
- A body, two heads and a plate out of aluminum alloy,
- Two linear guidance with balls with 4 lines type HGH,
- A ball screw of precision rolled, with a precision of the step of 52µ on 300 mm,
- Two stages of ends fixed and free,
- In option, bellows of protection.
- In version X/Y:
These linear tables functioning on 2 axes make it possible to realize
cross movements of precision with important loads.
Our engineering service remains at your disposal for any further information.
|
|
| DSM's FPA-2000E FlexFrame PiezoActuator(TM) provides precision motion control and positioning capabilities. The FPA-2000E is a flexure-guided piezoelectric actuator ideal for both dynamic and static applications where precise and accurate positioning is required. The FPA-2000E is available as a standard product with low voltage (150V) piezo material. The piezo actuator incorporates a preload for bi-directional motion and a titanium or stainless steel mechanical amplification structure. |
|
| Aerotech air bearings are perfect in semiconductor equipment, fiberoptics, photonics, and other critical industrial automation applications. Our air bearings incorporate an active preload on both vertical and horizontal surfaces. Opposing thin-film pressure maintains the bearing nominal gap tolerance. This design, in addition to the large air bearing surface that distributes the load over a large surface area, results in outstanding stiffness that is ideal for heavy or offset loading. |
|
DSM’s piezoelectric stage systems are flexure-guided for smooth motion that is free of stiction and backlash for micropositioning and nanopositioning applications. Wide, parallel flexures ensure parallelism in the output motion with minimal rotation.
DSM's piezo stage designs produce up to a full 1 mm motion range in a stable and stiff design. The particular ZSA-1000 model shown in the adjacent image includes a large 28mm diameter through-hole for optical or tooling access. The total stage height is 25 mm, and the stage's footprint is 105 x 120mm.
In semiconductor industry applications, DSM's 1 mm stage systems have been implemented in closed loop control using a SA series servo amplifier and a high resolution capacitive probe for 20nm position stability and very stable velocity ramp profiles.
DSM welcomes custom requests for flexure-guided piezo actuator designs. Please consider the following questions and contact us:
* What displacement range is required?
* What load will the actuator carry? Is it a static load or a dynamic load such as a spring force?
* What positioning resolution and accuracy are required?
* How fast does the actuator need to move, or at what frequency will you drive the actuator?
* What does the desired motion profile look like? (point-to-point, sinusoidal, etc.)
* Are you able to use open loop operation, or do you require closed-loop servo control?
* Are there any special environmental considerations (temperature, humidity, vacuum, etc.)?
* What are the geometric constraints for the actuator or stage? |
|
Linear Motor Table LT is a direct drive positioning table featuring a low sectional height and light weight. An AC linear servo motor and an optical linear scale are compactly integrated in the moving table and bed made of aluminum alloy, and miniature type linear motion rolling guides IKO Linear Way L are assembled in the table guide section. Linear Motor Table LT, adopting a C-shaped magnet yoke arranged in-between two stator magnets together with a moving coil, provides large driving force and achieves high speed and quick response positioning. Linear Motor Table LT is most suitable for applications requiring high speed operation such as semi-conductor and liquid crystal related equipment, measuring instruments, assembling systems, material transfer equipment.
Features:
Maximum thrust 900N for high thrust series
Compactness and high thrust were pursued by adopting miniature optical linear scale and C-shaped magnet yoke. Maximum thrust 900N is achieved by high-density coil arrangement. Also, compact series output 450N with the total height only 40mm
High acceleration and high response with a smooth motion
High acceleration and high response positioning can be made due to super light weight moving table and high thrust. The table can travel with a smooth motion by using C-shaped magnet yoke which cancels out magnet forces and eliminates the unnecessary load on the linear motion rolling guides. Also, C-Sleeve Linear Way, long term maintenance free type, is adopted for their linear motion rolling guides.
High resting stability and speed stability
High resting stability is achieved by the latest servo technology. This linear motor can be used as a high accurate positioning device. Also, high speed stability is achieved.
|
|
- Travel to 1800 µm
- Compact piezo stage design
- Resolution <1 nm
- Frictionless Precision Flexure Guiding System
- PICMA® High-Performance Piezo Drives
- Direct Metrology with Capacitive Sensors for Highest Precision
- Up to 0.02% Position Accuracy
- X, XY, Z, XYZ Versions
- Vacuum-Compatible Versions
P-620.1CD - P-629.1CD PIHera® piezo stage systems are flexure guided nanopositioning linear slides featuring travel ranges from 50 to 1800 µm. Despite the increased travel ranges, the units are extremely compact and provide sub-nanometer resolution. The long travel range is achieved with a newly designed, friction-free and extremely stiff flexure system, which also offers rapid response and excellent guiding accuracy (typically less than 5 µrad pitch/yaw over the full travel range). |
|
Aerotech photonics and fiberoptics nanopositioners are perfect for the high-volume manufacture of photonics and fiberoptics components and systems. Our fiberoptics positioning systems utilize Aerotech%u2019s own brushless linear servomotors for the maximum performance in the most compact package. We manufacture many models of drives and motion controllers to provide a complete fiberoptics and photonics manufacturing package that is virtually maintenance-free and available for 24/7 operation. Aerotech nanopositioners feature the highest closed-loop resolution available with up to six axes of coordinated motion.
|
|
The XM is the ultimate solution for the most demanding manufacturing and test and measurement applications. It meets ultra-precision motion requirements with high dynamics and reliability for 24/7 production environments. Typical applications include semiconductor wafer inspection, sensor test and calibration, laser machining and ultra-precision assembly.
Unlike screw driven stages, the XM employs a center-driven, ironless linear motor as the driving element. Since the linear motor is a frictionless direct drive device, there is no backlash or hysteresis, wind-up or stiction limiting the motion performance. The linear motor drive also offers the advantage of higher speed, acceleration and system responsiveness with no wear to motor brushes or drive screws. The extra-large, ironless motor coil ensures zero cogging for ultra smooth velocity control and provides higher efficiency compared to alternative stage designs. This results in significantly less heat generation, which is generally the main limit for ultra-precision motion applications. To further improve thermal management and its effect on stage performance, the XM also has the benefit of a sophisticated length decoupling of the magnetic track from the stage carriage.
XM stages are machined from stress-relieved 7075 aluminum, ensuring long-term strength and stability. All critical stage surfaces undergo multiple machining processes and precision grinding under strict temperature and quality control to further improve overall performance and accuracy. |
|
| Small, step motor driven stages for light weight (1-15 kg) payload scanning and positioning. Travel ranges from 5 cm to 75 cm. Includes stages, motors and programmable motor controller. |
|
- Unique Design: Both Piezo Stage and Piezo Actuator
- Frictionless Precision Flexure Guiding System
- 0.05 nm Resolution
- Direct Metrology with Capacitive Sensors for Highest Precision
- Ultra-Fast Response, Very Compact
- PICMA® High-Performance Piezo Drives
- ID-Chip for AutoCalibrate Function
- Vacuum Versions Available
The P-753 LISA (Linear Stage Actuators) high-speed piezo stage nanopositioners can be used both as linear actuators or as translation stages. They are equipped with capacitive feedback sensors, frictionless, flexure guiding systems and high-performance piezo drives providing a positioning and scanning range of up to 38 µm with very fast settling time and extremely low tip/tilt error. |
|
- Flexure-guided Piezo Stage provides highest precision
- Fast Response (1 kHz Resonant Frequency)
- Stainless Steel Construction
- Frictionless Precision Flexure Guiding System
- 80 µm Travel Range
- Direct Metrology with LVDT Sensor
- Resolution <5 nm
- PICMA® High-Performance Piezo Drives
P-780 flexure-guided piezo stages are extremely compact and fast devices, providing a positioning and scanning range of up to 80 µm with settling times of only a few milliseconds. The P-780 is designed for applications with loads up to 100 g. Closed-loop and open-loop versions are offered to fit your application.
Direct-metrology LVDT sensorP-780.20 models feature direct-measuring, non-contact LVDT sensors (direct metrology). |
|
... see all the products in the category
| |
