Piezoelectric XY stage CEDRAT TECHNOLOGIES
XY120S Stages; max 115 µm
The piezoelectric stage X120S has a stroke up to 110µm along the X axis and can be equipped with strain gauges for a very fine accuracy up to 10 nm. Parasitic rotations (along X and Y axis) are very limited. The moving frame can be custom designed (attachment points, holes...).
Performance: Max No-load displacement(µm):115; Heigth (mm): 12; Dimensions (mm):30*30; Resolution(nm): 1.2; Unloaded resonance frequency(Hz): 1200; Response time: 0.42
More specifications...
