Piezoelectric XYZ stage CEDRAT TECHNOLOGIES
XYZ200M

The piezoelectric stage XYZ200M is based on APA200M actuators and posseses a high stiffness. Applications include confocal microscopy, mask positioning, inspection.

Max no load XY displacement (µm): 180
Max Z displacement (µm) 200
Height(mm): 44
Dimensions (mm): 100*100
Resolution (nm): 1,8
Unloaded resonance frequency (Hz): 380
Response time (ms): 1,32

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