Piezoelectric XYZ stage
max. 180 µm | XYZ200M
CEDRAT TECHNOLOGIES
Description: The piezoelectric stage XYZ200M is based on APA 200M actuators and posseses a high stiffness. Applications include confocal microscopy, mask positioning, inspection
Performance: Max no load displacement (µm): 180; Height(mm): 44; Dimensions (mm): 100*100; Resolution (nm): 1,8; Unloaded resonance frequency (Hz): 380; Response time (ms): 1,32
Available options:Strain Gages; Eddy Current Sensors, Vacuum
Status:Standard
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