Wafer control module VULCANO XYT

3-axis

The VULCANO XYT platform is made up of the standard VULCANO XY outfitted with the RTTB rotary module which includes high resolution encoder coupled to an outstanding mechanical bearing. The use of this platform is suitable for, but not limited to: - Wafer Process Control applications such as Overlay Metrology, Critical Dimension and Thin film Metrology - Back-end: specific flip-chip processes made on large panels/substrates Characteristics - Compact footprint - Nanometer position stability - Short move and settle times - High dynamics - High bidirectional repeatability - High position stability - ISO class 1 clean room compatibility