Direct-drive rotary axe DXRH

for semiconductorsprecision

The DXRH is the newest addition to ETEL rotary axes solutions. This is a 1 DOF mechanical bearing based rotary axis providing outstanding performance in terms of accuracy and precision. Featuring a 360’000 lines encoder and unmatched mechanical characteristics directly comparable with air bearing solution without the associated complexity, the DXRH is served at its heart by HEIDENHAIN best in class encoder and bearing technology, and ETEL direct drive technology toothless motor without any torque ripple. Fully compatible with standard ETEL interfaces, the DXRH module is available as a standalone module or integrated on ETEL system’s portfolio. It also provides a performance upgrade path for all DXR+ based applications without any redesign as the interfaces are identical. The DXRH rotary module can be integrated to the CHARON2 and the VULCANO2 stacked platforms. It brings high stiffness, high precision, high accuracy, high cleanliness level as well as low thermally induced deformation thanks to its stainless steel design. With focus on easing semiconductor applications, the module remains a match to all diverse markets and needs requiring solutions for high precision and high accuracy rotation. Suited to diverse applications and industries, the DXRH rotary module is especially suitable for Wafer Process Control applications such as Overlay Metrology, Critical Dimension and Thin film Metrology as well as photonics.