Energy dispersive X-ray fluorescence (EDXRF) spectrometer
X-RAY XDV®-µ
FISCHER
Features
Measuring instrument optimised for micro-analysis
Depending on the X-ray optics, structures with a size of
100 μm or less can be analysed
Very high intensities and thus good precision
Even for thin coatings, measurement uncertainty < 1 nm possible
Suitable only for plane or nearly plane samples
Large and spacious measurement chamber with a cutout
(C-slot)
Automated series testing with fast, programmable XY-stage
Typical fields of application
Measurement of coating systems on PC Boards, leadframes and wafers
Measurement of coating systems on small components and thin wires
Materials analysis on small structures and small components
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