Mass flow controller SEC-E

for gas

Solenoid valves of the SEC-E series are used for the measurement and control of fluid mass flow rates, and are compatible with non corrosive gases. These normally closed solenoid valves are mainly used in situations that require high precision, such as various semiconductor, photovoltaic and micro machining manufacturing processes. They gather all the vital fluid information through the direct analysis of the mass of the flowing fluids, therefore eliminating the need for corrections for environment changes that is a common situation in case of the volumetric flow rate measurements, where temperature and pressure are carefully analyzed.