Thermal mass flow controller SEC-Z700X

for gasdigitalcompact

Pressure Insensitive Mass Flow Controller The SEC-Z700X Series is equipped with reliable thermal sensors and a pressure insensitive function for stable flow rate control. The on-board pressure measurement reduces the cost, size and complexity of gas delivery systems. Pressure Insensitive A new high-performance function provides a simplified gas supply system. Typical multi chamber gas lines have a line regulator, pressure sensor and filter to avoid the mass flow controller crosstalk phenomenon caused by pressure fluctuations. The SEC-Z700X Series demonstrates high stability and controls the gas flow without effecting the upstream and downstream pressure fluctuations. Flow rate output, temperature and pressure readings are provided. FEATURES Multi Gas / Multi Range function The gas type and full scale flow rate can be changed by the customer Variable PID function gives high speed response (within 1 second) across the whole flow range Compact gas line There is no need for a regulator, transducer and filter Stable control of the gas flow without effect by upstream and downstream pressure fluctuations Integrated Inlet Pressure Sensor On board Multi display Warranty 1% Set Point high accuracy Ultra clean design - metal diaphragm, all stainless SUS-316L and polished surface treatment(standard). Compact size Same fitting to fitting dimension up to 50 SLM Signal compatibility Analog/RS485 Digital Model , DeviceNet™ Model Network function Controlled by digital signal.