Thermal flow meter D700uFmassfor gasPFA
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Characteristics
- Technology
- thermal
- Type
- mass
- Fluid
- for gas
- Material
- PFA
- Process temperature
Max.: 45 °C
(113 °F)Min.: 15 °C
(59 °F)- Process pressure
Max.: 4.12 bar
(59.76 psi)Min.: 2.4 bar
(34.81 psi)
Description
D700uF(Micro Flow) is designed for ≤ 5SCCM flow application.
≤ 5SCCM flow control has been very critical in high aspect ratio process.
Specialized components and newly developed in-house low flow standard allow high accuracy flow control down to 0.025SCCM.
Down to 0.025SCCM flow control capability
Precise tuning gas control, enhance process tunability
≤ 100ms Step-up Response & MFC-to-MFC deviation control
Deliver high productivity and greater process performance
In-House flow metrology
Reliable performance from all manufactured products
State Monitor Function
Provide more internal data for smarter failure prediction
Better Valve Shut-off and Corrosion Resistance by PFA nozzle
Robustness with less particle risk reduce down time and optimize yield
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Mass Flow Controller and Module
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