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... for digital mass flow controllers. It has multi-range/multi-gas functions enabling users to change the type of gas or full-scale flow rate on-site quickly and easily. With high accuracy +/- 1.0% S.P, piezo actuator ...
HORIBA STEC
... The SEC-N100 Series is suitable for a large variety of industries and applications. This mass flow controller can control a wide range of flows: from 10 SCCM to 1000 SLM. The SEC-N100 Series also has ...
HORIBA STEC
Flow rate: 3 l/min - 150 l/min
Pressure: 1 bar - 3 bar
... digital mass flow controller with a fairly high accuracy. This controller features an accuracy of ±1.0% S.P and can be operated in high temperatures. It is a clean gas supply unit that can be used for analysis of extremely small gas ...
HORIBA STEC
Pressure: 1 bar - 3 bar
... chamber gas lines have a line regulator, pressure sensor and filter to avoid the mass flow controller crosstalk phenomenon caused by pressure fluctuations. The SEC-Z700X Series demonstrates high stability and controls ...
HORIBA STEC
Flow rate: 0 us gal/min - 100 us gal/min
Pressure: 1 bar - 3 bar
... micro-litre to ultra low flow rate control Enable precision flow control of low boiling point and high viscosity liquids Ultra clean. Measurement Techniques Cooling Measurement ...
HORIBA STEC
Pressure: 3, 4 bar
... The GR-511F can control gases used to cool the back side of wafers that are fixed in position by an electrostatic chuck system. The stability and accuracy of the GR-511F makes it ideal for controlling the flow of Helium ...
HORIBA STEC
Flow rate: 0 l/min - 2 l/min
... purpose mass flow controller has a reliable thermal sensor and solenoid valve, allowing you to achieve high-level control of gas flow. A versatile component, the mass flow controller ...
HORIBA STEC
Flow rate: 1 l/min - 5 l/min
Pressure: 3 bar
... sensor or flow rate sensor and ratio control unit (PCU series) you can use the Piezo Actuator Valve PV Series to create a pressure control or flow rate control system. Benefits: ...
HORIBA STEC