Incremental angle encoder BH20 series

opticalnon-contacthollow-shaft

Compact, reflective rotary Laserscale featuring high accuracy, high resolution and high response speed. Ideal for high-resolution angle measuring in semiconductor manufacturing equipment, precision measuring instruments, and aspheric surface processing machines. Signal wavelength: 250nm Highspeed response: 1,500mm/s (When using analog output), 700mm/s (When using interpolator BD96), 160min-1 (when using r=41mm scale), 555min-1(when using r=12mm scale) High resolution: 4,294,967,296 pulses/rotation (when using r=41mm scale, divisions=4,096) 3.017 x 10-4 sec (when using r=41mm scale) 1.46nrad (when using r=41mm scale) Available with/without reference point Thin head with thickness of 12mm Interpolators with various resolutions and output modes available Special non-magnetic and vacuum-compatible models available