Combined pirani and hot cathode vacuum sensor
1000 - 1e-9 mbar, 0 - 10 V, RS485 | VSH82
Thyracont Vacuum Instruments GmbH
The compact VSH82 Pirani/hot cathode combination transducer measures absolute pressure from atmosphere to ultrahigh vacuum.
The intelligent, micro processor controlled Smartline transducers automatically manage the appropriate interaction of both vacuum sensors regarding measurement ranges and switching points to achieve high accuracy.
Benefits
" Combination sensor with wide measuring range
" Patented pulsed Pirani sensor with extended range allows operation of the hot cathode at lower pressure and increase of lifetime
" Excellent repeatability and accuracy
" Logarithmic signal output 0 - 10 V and digital RS 485 interface
" Replaceable sensor heads, without electronics bakeable up to180 °C
" Correct pressure readings by means of separate gas type correction factors for Pirani and hot cathode sensors
" Bayard-Alpert with double filament, in the event of filament failure the gauge automatically switches to the backup, insensitive against inrush of air
" Two independent, dry relay switch points
Typical Applications
" Analysis technology
" Coating plants and vapor deposition
" Measuring and controlling from fine to ultrahigh vacuum
" Process engineering
" Vacuum furnaces
" Sputtering plants
