Clean room positioning systems

Repeatability: 0.02 mm - 0.1 mm
Load: 3 kg - 120 kg
Speed: 100 mm/s - 4,000 mm/s

Linear Motion XYZ Stage Gantry Robot Multi-axis Positioning Guide System Belt Driven Actuator Ball Screw Module, Belt Driven Linear Guide, Positioning Stage, Motion ...

XYZ Stage Multi-axis Positioning Table Linear Gantry System Cartesian Robot Technical Feature FSL40 linear guide is aluminum profile, body width ...

... Max Speed: 255mm/s Max Load: 25kg Ball Screw: G1204/G1605/G1610 Ball Screw Module, Belt Driven Linear Guide, Positioning Stage, Motion Controller for Cartesian Robot. CE, FCC, RoHS, ISO9001 Certification. Huge ...

Repeatability: 0.03 mm
Load: 25 kg
Stroke: 50 mm - 1,000 mm

... Max Speed: 255mm/s Max Load: 25kg Ball Screw: G1204/G1605/G1610 Ball Screw Module, Belt Driven Linear Guide, Positioning Stage, Motion Controller for Cartesian Robot. CE, FCC, RoHS, ISO9001 Certification. Huge ...

Repeatability: 1 µm
Load: 15 kg
Stroke: 200 mm - 1,000 mm

... Versions for clean room ISO 14644-1 (up to class 1 on request) - Rack, vibration isolation, enclosure, safety concept - Extension of degrees of freedom for XYZ-Rx-Ry-Rz motions - Individual solution ...

Repeatability: 0.3 µm - 2.5 µm
Load: 5 kg - 20 kg
Stroke: 100 mm - 720 mm

... simultaneously This inspection system consists of four clean room axes and allows the automated measurement of multiple objects simultaneously. High dynamics and highest reproducibility ...

Repeatability: 1.9 µm - 4.4 µm
Load: 50 kg
Stroke: 100 mm - 1,000 mm

... cycles and a maintenance interval of 500,000 full cycles resp. every 2 years This positioning system moves a vacuum chuck on an area of 1000 x 1000 mm. The standard system ...

Repeatability: 0.4 µm - 0.8 µm
Stroke: 100 mm - 300 mm
Speed: 80 mm/s - 630 mm/s

... head or for sensors for quality control • Extremely high repeatability up to 0.4 µm for 3D printing • Clean room compatible with high durability and long maintenance intervals This ...

Repeatability: 10 µm
Load: 830 g
Stroke: 14 mm

... combination with further linear, leveling or rotary tables e.g. DT240 - Individual system configuration, vibration isolation, enclosure, safety concept - Versions for clean room ISO ...

Repeatability: 0.001 µm - 3.5 µm
Load: 6.5 kg
Stroke: 4 mm - 20 mm

6-axis miniature XYZ-Theta-Phi-Delta positioning system (clean room ISO 5) Customizable: • Ideal for automated inspection of wafers and optics up to 300 mm / 12" • ...

... process control applications such as thin film metrology, critical dimensions, etc. Characteristics - Infinite rotation - Built-in vacuum supply at wafer chuck level - Built-in gravity compensator - ...

Repeatability: 0.3, 0.5 mm
Stroke: 100, 820 mm
Speed: 150, 750 mm/s

... • Low-maintenance 24/7 operation and flexible maintenance concept due to fast system exchange on the granite structure Optionally expandable: • Version for clean room ISO 14644-1 ...

Repeatability: 1.5, 2.5 µm

Double XY linear axis for high-precision adjustment of lenses for wafer steppers | ultra-fine UV exposure in the clean room - Precision Assemblies High precise adjustment of two optics This high-precision ...

Repeatability: 0.6, 1 µm
Stroke: 10 mm
Speed: 25 mm/s

... maintenance and flexible 24/7 operation over many millions of cycles under clean room conditionse Optionally expandable: • Adaptation of strokes, length combination and control system • ...

Repeatability: 3, 5 µm
Stroke: 200 mm
Speed: 30 mm/s

... stable non-contact optical measurement. This XY combination has a separate Z-vertical unit to mount a custom microscope, camera or sensor. The KT310 cross-stage with stepper motor on the granite plate moves the wafer ...

X Phi positioning system for inspection of wafers, biological samples (clean room ISO 5) | rotary axis and linear stage - Inspection and Mikroscopy High-precision ...

XYZ Phi inspection system suitable for 12 inch wafers, printed circuit boards (clean room ISO 2) - Inspection and Mikroscopy Universal 4-axis granite gantry with cleanroom housing This ...

Speed: 130, 330 mm/s

XY-Z positioning system for high-throughput screening of microtiter wells (clean room) | high-precision for pharmaceutical testing, life science testing, etc. - Laboratory ...

Repeatability: 1 µm

... cleanroom applications This inspection system (shown here without cover) is specially designed for automated quality assurance. The positioning system allows positioning ...

Repeatability: 1 µm

... integration or connection to automated handling systems • Additional casing with integrated extraction or housing for applications up to clean room class ISO 6 Optionally expandable: ...

... and Y for higher speed and longer life with lubrication • Versions for clean room ISO 14644-1 class 4 (up to class 1 on request) References OMNY—A tOMography Nano crYo stage | ...