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Positioning locator with interpolated electric actuators with ball bushings and brushless servo motors, all controlled by a digital driver system to provide the geometric alignments. • ...
Repeatability: 0.005 µm - 4.4 µm
Load: 5 kg - 25 kg
Stroke: 100 mm - 365 mm
8-axis positioning system / goniometer Customizable • Automated 8-axis inspection from different angles • Coaxial rotation system that pivots cameras / sensors / ...
XYZ Stage Multi-axis Positioning Table Linear Gantry System Cartesian Robot Technical Feature FSL40 linear guide is aluminum profile, body width ...
Fast 3-axis UHV system LA80-LA90 UV / UHV / EUV, max. 500 mm travel, 2 µm repeatability, 5 kg load This fast transfer stage is suitable for precise, fast and long-life applications in ultra-high ...
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