The PFLOW2001 series of mass flow sensors are madewith micromachined (MEMS) sensing elements thatoffer an innovative thermal sensing principle withexcellent linearity and removal of gas sensitivity of somecommon gases.
This PFLOW2001 Series mass flow sensor series offera fully customizable flow dynamic range of 100:1 withthe full-scale flowrate from 30 sccm to 5000 sccm.The sensors are opted with digital and analog interface,bi-directional sensing capability with an operationaltemperature range of -25 to 85 °C (-13 to 185 °F).
• Wide supply voltage 8 … 15V and 2.7 … 5.5V for low power version
• Linear output 1…5V, low power version 0.2 … 2V
• Digital I2C bus output
• Fast response time (2ms typ.)
• 3-pin version with analog output for retrofit and as a replacement for older designs
• RoHS and REACH compliant
Measuring range [SCCM]
0 to 10...5000 SCCM
Output signal
Linear, 0.5...4.5 VDC, I2C
Accuracy [± % FS] max.
1.5
Supply voltage [VDC]
2.7...15
Humidity range
0...95% RH, no icing or condensation
Supplier
Angst+Pfister Sensors and Power
The new Angst+Pfister Sensors and Power (APSP) PFLOW2001 flow sensors are based on MEMS technology and measure according to the thermal principle.