Roots vacuum pump iXM

drysingle-stagegas

Greener and more reliable with a lower cost of ownership Our innovative range of dry pumps brings you cutting-edge technology designed to enhance your semiconductor and electronics manufacturing environment. Each range has been specifically designed to give advantages in environmental performance, reliability in harsh conditions and agility in light duty applications. Edwards iXM low energy series dry pumps can bring real process improvements with increased uptime, reduced environmental impact and cost benefits for your most critical applications. Energy efficient roots mechanism can reduce input power by up to 60%, reducing environmental impact and lowering cost of ownership Gas barrier technology and thermal design improvements enable 4x greater corrosion resistance than our previous series Advanced powder handling features deliver maximum reliability and extended pump life for multi-layer etch processes Reduced power consumption for CVD processes Compact and lightweight design, combined with exceptionally low noise and vibration, gives you more versatility The iXM series is available with XCEDE technology for enhanced corrosion resistance.