iXM low energy dry pumps can bring real process improvements with increased uptime, reduced environmental impact and cost benefits for your most critical applications.
Energy efficient roots mechanism can reduce input power by up to 60%, reducing environmental impact and lowering cost of ownership
Gas barrier technology and thermal design improvements enable four times greater corrosion resistance than our previous series
Advanced powder handling features deliver maximum reliability and extended pump life for multi-layer etch processes and reduced power consumption for CVD processes
Compact and light-weight design, combined with exceptionally low noise and vibration, gives you more versatility
Available with Xcede technology for enhanced corrosion resistance.