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Cryogenic vacuum pump IS 320FX
lubricatedsingle-stagefor water

Cryogenic vacuum pump - IS 320FX - EDWARDS - lubricated / single-stage / for water
Cryogenic vacuum pump - IS 320FX - EDWARDS - lubricated / single-stage / for water
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Characteristics

Technology
cryogenic
Lubrication
lubricated
Number of stages
single-stage
Applications
for water
Other characteristics
water-cooled
Ultimate vacuum

0.4 bar
(5.8 psi)

Flow rate

Max.: 13,000 l/s
(3,434.24 us gal/s)

Min.: 3,600 l/s
(951.02 us gal/s)

Description

Unparalleled vacuum performance and energy efficiency Edwards CTI-Cryogenics IS cryopump systems leverage innovative, high-efficiency technology to provide unparalleled vacuum performance and energy efficiency. A patented distributed control system monitors and constantly adjusts individual elements of the cryopump system to maintain optimal system-wide vacuum performance for exceptional process consistency. On-Board IS cryopumps deliver the highest uptime, best productivity, and lowest overall cost of ownership of any cryopump system available today, backed by Edwards highly responsive global service and support network. Key Features The patented distributed control system monitors and constantly adjusts individual elements of the cryopump system Maintains optimal system-wide vacuum performance, delivering exceptional process consistency Quickest regenerations in single and multi-pump configurations Low consumption of energy and cooling water with no compromise in vacuum performance Easy system integration Fast production installation Enhanced remote monitoring for both preventive and predictive maintenance

Catalogs

IS 320FX
IS 320FX
2 Pages

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