filter gas purifier
GateKeeper® Hydride Gas Purifiers
Cost-effective, environmentally friendly gas purification
Designed for use with NH3, AsH3, PH3, SiH 4, and GeH4. The purifiers remove O2, CO2, H2O and oxidation byproducts to sub-ppb (part-per-billion) levels.
Guards against bulk gas purifier breakthrough, impurity spikes from liquid storage tanks, cylinder changeouts and unexpected contaminants in the process
Does not release hydrocarbons that may contaminate the process
Uses ambient temperature purification technology – no power or heat required
Low pressure drop across purifiers