gas purification system

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GateKeeper® Gas Purification Systems
GPS media series (HX, DX and Z2) deliver an array of purified gases in the parts-per-trillion (ppt) levels at a low cost of ownership
Maximum flow rates ranging from 311 SLM to 932 SLM
Applications include immersion lithography tools, semiconductor and LED production
Purifiers automatically self-regenerate, guaranteeing a continuous flow of pure gas
Compact design uses minimal fab floor space to ensure facility cost savings