Linear motor-driven linear axis

precisionfor clean rooms

Overview Linear motor axis with moving magnet principle (coil unit with measuring head is fixed and the magnetic track moves the slide with a measurement system) For positioning of optics Demands Use in clean rooms ISO class 100 - no abrasion or wear on the cables Use in 3-shift operation on 7 days/week Very high mechanical accuracy Temperature stability: 22°C ±2° Implementation A common recirculating linear ball bearings for all slides Base plate material selected according to the thermal expansion coefficient of the guide Construction and drives offset from each other - to optimize the overall length Specification Acceleration: max. 3.000 mm/s Velocity: 400 mm/s Height error per slide: ≤1 µm Lateral error per slide: ≤1 µm Max. height error of the slides to each other: 100 µm Max. rolling error, yawing error, lufting error: ≤±100 µrad Stroke: 50 mm (more possible) Resolution measuring system: 0,05 µm (50 nm) Reproducibility in movement direction: <0,5 µm