Linear motor-driven linear axis

with servo-motorprecision

The precision axis is a granite beam with a highly precise precision axis. The complete system includes a servo controller for various fieldbuses (EtherCAT, Profinet, CAN, ..). This axis is for high-precision applications such as wafer inspection, scanner, measurement suitable. - Granite beam with a highly precise axis - Complete system including servo controller for various fieldbuses (EtherCAT, Profinet, CAN, ..) - For high-precision applications (wafer inspection, scanning, measurement) Demands - Full-surface mounting on the machine frame - Including energy chain and assembled cable set - Delivery as a fully assembled and commissioned axis system - Accuracies guaranteed at ±2K constant temperature Implementation - Developed for customer-specific requirements - Ironless linear motor with precision rail guide Velocity: max 500 mm/s Acceleration: max. 1 m/s² Reproducibility: 0,5 µm Positioning accuracy: 5 µm Positioning resolution: 0,1 µm Repeatability (side): 5 µm Repeatability (height): 1 µm Load: max. 1 kg