Roughness profilometer MPR100

direct-contact

Profile and Roughness tester Features & Advantges: 1.Combined with Profile and Rougness detector in one machine 2.Digital Profile detector 3.Real-time Profile track display 4.Standard roughness detector without nosepiece Technical data: Model - MPR100 Measuring range - X axis - 100~220mm - Z axis - 320~620mm - Z1 axis - C:0~±30mm/R:±420μm Profile accuracy - Z1 linear - ±(1.5+|0.2H|)μm - Arc - ±(2+R/8)μm - Angle - ±2′ - Straightness - 0.8μm/100mm Roughness accuracy - Linear - ±(7nm+3.5%)μm - Residual noise - ≤0.025μm - Repeatability - 1δ≤2nm - Cutoff wavelength - 0.025、0.08、0.25、0.8、2.5、8mm - Evaluation length - λcX2、3、4、5、6、7 Driving speed - X axis: 0.1-10mm/s - Z axis: 0.5-10mm/s