XY stage MS15

translationpiezoelectric2-axis

for high vacuum conditions up to 10^(-6) mbar 15 x 15 mm footprint Ultra small miniature translation stages with piezo electic inertial drive. Vacuum edition of MS15. Technical data Width - 15 mm Height - 7 mm Depth - 15 mm Max. Load (2 axis) Mx, My, Mz (momentum) - 4 Ncm Blocking forces (Fx, Fy) - 3 N Bearing force (Fz) - 20 N Guidance accuracy Yaw angle - 20 arc sec Pitch angle - 60 arc sec Vertical deviation - 1 um Lateral deviation - 2 um