Thermal mass flow controller MF1100B

for nitrogen

THE MODEL MF1100B MASS FLOW CONTROLLER FEATURES EXTENDED CAPABILITY OF RANGES UP TO 20 SLM, HIGHER TERMPERATURE STABILITY AND MANY FUNCTIONS. Features ■MINIMUN RANGE OF 5 SCCM & UP TO 20 SLM ■COMPACT SIZE ■STANDARD SOFT-START FUNCTION ■MINIMUM LEAKAGE OF 1.013×10-9Pa·m3/s (He)