Photoluminescence inspection system Imperia®
optical3Dautomated

photoluminescence inspection system
photoluminescence inspection system
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Characteristics

Technology
optical, 3D, photoluminescence
Operational mode
automated
Type
for defect detection
Product applications
for wafers
Other characteristics
computer-controlled

Description

With its unique optical design technology, the Imperia system detects and classifies yield-killing defects with the additional benefit of simultaneous state-of-the-art photoluminescence (PL) production monitoring. Product Overview With unique optical design technology, the Imperia system detects and classifies yield-killing defects with the additional benefit of simultaneous state-of-the-art photoluminescence (PL) production monitoring. Combining these two post-epitaxial metrology screening functions into a single high throughput system minimizes valuable fab space use and cassette handling time. This product can provide significant economic savings to the user (for example: accurately predicting MOCVD reactor yield and PM schedules). • High density spectral PL mapping • Defect analysis and classification • Epitaxial layer thickness and normalized reflectivity imaging at high resolution • Wafer shape profiling and 3D bow reconstruction

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