- Metrology - Laboratory
- Metrology and Test Equipment
- Semiconductor metrology system
- Onto Innovation Inc.
Semiconductor metrology system RPMBlue™
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Characteristics
- Type
- for semiconductors
Description
The RPMBlue system is a photoluminescence (PL) mapper that can meet the needs of almost all compound semiconductor users.
Product Overview
The RPMBlue system is designed to provide accurate, precise and reliable PL spectral metrology across the entire wavelength range. This includes from high-Al content AlGaN alloys for GaN FET’s and UV lasers/LED’s to communication laser applications in the NIR and everything in between. The RPMBlue offers a catalog of more than 15 standard lasers and the ability to fiber-feed a virtually unlimited array of sources.
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