wafer metrology system
QS4300™

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wafer metrology system wafer metrology system - QS4300™
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Characteristics

  • Type:

    for wafers

Description

The only tool on the market with the unique combination of transmission and reflection based technology. This system is the industry standard for dielectric monitoring.

Product Overview

The QS4300 system is the tool of record for wafer suppliers for high speed impurity mapping and epi thickness measurement. It is the only tool on the market with the unique combination of transmission and reflection based technology. This system is the industry standard for dielectric monitoring.

We collaborated with wafer suppliers to further improve critical wafer characteristics like epi layer thickness, epilayer resistivity and bulk resistivity using Onto Innovation’s reflection based technique.

The QS4300 system's transmission is a classic, direct method providing best sensitivity for monitoring dielectrics like BPSG, FSG, H in SiN, etc. Machine learning is used to eliminate use of monitor wafers for dielectric measurement. Reflection only based systems do not have sensitivity to most of these dielectrics.

Applications

Epi layer thickness
Transition zone thickness
Epi and substrate resistivity
Power device
Bulk resistivity
Edge exclusion
Interstitial oxygen and substitutional carbon
BPSG – Boron and phosphorus content of BPSG layers