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Vertical positioning stage P-518, P-528, P-558 series
tiltpiezo3-axis

vertical positioning stage
vertical positioning stage
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Characteristics

Orientation
vertical, tilt
Type
piezo
Number of axes
3-axis
Other characteristics
closed-loop, frictionless guided, closed-loop, high-accuracy
Stroke

Max.: 240 mm (9.449 in)

Min.: 50 mm (1.969 in)

Description

Z and tip/tilt stages with 3 axes / Z stages with 1 axis Closed-loop vertical / tilt range to 200 µm / 2 mrad (open-loop to 240 µm / 2.4 mrad) Parallel kinematics for faster response times and higher multi-axis accuracy Zero-play, high-precision flexure guide system Outstanding lifetime due to PICMA® piezo actuators Clear aperture 66 mm × 66 mm Highest linearity due to capacitive sensors Outstanding lifetime thanks to PICMA® piezo actuators The patented PICMA® piezo actuators are all-ceramic insulated. This protects them against humidity and failure resulting from an increase in leakage current. PICMA® actuators offer an up to ten times longer lifetime than conventional polymer-insulated actuators. 100 billion cycles without a single failure are proven. High guiding accuracy due to zero-play flexure guides Flexure guides are free of maintenance, friction, and wear, and do not require lubrication. Their stiffness allows high load capacity and they are insensitive to shock and vibration. They are 100 % vacuum compatible and work in a wide temperature range. High tracking accuracy in the nanometer range due to parallel position measuring All degrees of freedom are measured against a single fixed reference. Undesired crosstalk of motion to another axis can be actively compensated in real time (depending on the bandwidth) (active guiding). High tracking accuracy is achieved in the nanometer range even in dynamic operation.

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*Prices are pre-tax. They exclude delivery charges and customs duties and do not include additional charges for installation or activation options. Prices are indicative only and may vary by country, with changes to the cost of raw materials and exchange rates.