Z and tip/tilt stages with 3 axes / Z stages with 1 axis
Closed-loop vertical / tilt range to 200 µm / 2 mrad (open-loop to 240 µm / 2.4 mrad)
Parallel kinematics for faster response times and higher multi-axis accuracy
Zero-play, high-precision flexure guide system
Outstanding lifetime due to PICMA® piezo actuators
Clear aperture 66 mm × 66 mm
Highest linearity due to capacitive sensors
Outstanding lifetime thanks to PICMA® piezo actuators
The patented PICMA® piezo actuators are all-ceramic insulated. This protects them against humidity and failure resulting from an increase in leakage current. PICMA® actuators offer an up to ten times longer lifetime than conventional polymer-insulated actuators. 100 billion cycles without a single failure are proven.
High guiding accuracy due to zero-play flexure guides
Flexure guides are free of maintenance, friction, and wear, and do not require lubrication. Their stiffness allows high load capacity and they are insensitive to shock and vibration. They are 100 % vacuum compatible and work in a wide temperature range.
High tracking accuracy in the nanometer range due to parallel position measuring
All degrees of freedom are measured against a single fixed reference. Undesired crosstalk of motion to another axis can be actively compensated in real time (depending on the bandwidth) (active guiding). High tracking accuracy is achieved in the nanometer range even in dynamic operation.