Mirror tilting stage S-340 series

verticalpiezoelectric2-axis

• Resolution up to 20 nrad, excellent position stability • Optical beam deflection to 4 mrad • Various different materials for adapting the CTE between the platform and mirror • Parallel kinematics for higher accuracy and dynamics • Sub-ms response time • Closed-loop versions for improved linearity • Excellent temperature stability Application fields • Image processing / stabilization • Optical trapping • Laser scanning / beam steering with large deflection angle • Laser tuning • Optical filters / switches • Optics • Beam stabilization Outstanding lifetime thanks to PICMA® piezo actuators The PICMA® piezo actuators are all-ceramic insulated. This protects them against humidity and failure resulting from an increase in leakage current. PICMA® actuators offer an up to ten times longer lifetime than conventional polymer-insulated actuators. 100 billion cycles without a single failure are proven. High guiding accuracy due to zero-play flexure guides Flexure guides are free of maintenance, friction, and wear, and do not require lubrication. Their stiffness allows high load capacity and they are insensitive to shock and vibration. They work in a wide temperature range. High dynamics multi-axis operation due to parallel kinematics In a parallel-kinematic multi-axis system, all actuators act on a common platform. The minimum mass inertia and the identical design of all axes allow fast, dynamic, and nevertheless precision motion. Material options for adapting the CTE of the mirror and platform The following material combinations are recommended for adapting the thermal expansion coefficient: