Rotary stage Q-632 Q‑Motion®

piezoelectriccompactvacuum-compatible

• Only 32 mm in width and 8 mm in height • Direct position measurement with incremental encoder with 0.75 µrad resolution • Up to 3 µrad minimum incremental motion • Rotation range >360° • Velocity 45 °/s Product Description Piezo inertia drives are space-saving and affordable piezo-based drives with relatively high holding forces and a virtually unlimited travel range. The inertia drive principle is based on a single piezoelectric actuator that is controlled with a modified sawtooth voltage provided by special driver electronics. The actuator expands slowly and moves the runner. Due to its inertia, the runner is unable to follow the subsequent fast contraction of the actuator and remains at its position. The drives acting directly on the runner achieve velocities of max. 45 °/s with an operating frequency up to 20 kHz. Application fields Microassembly. Photonics. Optical alignment. Microscopy. Beamline instrumentation. Semiconductor technology. Testing.