XY stage M-11 series
XYZelectriccompact

XY stage - M-11 series - Physik Instrumente - XYZ / electric / compact
XY stage - M-11 series - Physik Instrumente - XYZ / electric / compact
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Characteristics

Orientation
XY, XYZ
Type
electric
Other characteristics
compact, closed-loop, vacuum-compatible
Stroke

5 mm, 15 mm, 25 mm
(0.197 in, 0.591 in, 0.984 in)

Speed

1 mm/s, 1.5 mm/s

Repeatability

0.25 µm, 2 µm

Description

Suitable for vacuum up to 10-6 hPa Very compact due to folded drive Closed-loop DC motors Noncontact reference and limit switches XY setups can be mounted directly Compact linear stage, versatile in use Linear stage with compact size due to folded drive with belt drive. Clear aperture with 10 mm Ø. XY setups can be mounted directly without adapter plate. Reduced outgassing especially for use in vacuum environments Most notably, for the lubrication of the guides and the spindle a material with particularly low outgassing is used. This allows a bakeout temperature of up to 80° C. With this and other modifications of the PI V6 vacuum class, this positioner can be used up to 10-6hPa. Drive Closed-loop DC gear motor Backlash-compensated threaded spindle Position measuring Rotary encoder on the motor shaft Noncontact Hall effect reference and limit switches Application fields Vacuum chambers. Research. Beamline instrumentation. Microscopy. Electronics assembly and inspection.
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