XY stage M-11 series

XYZelectricclosed-loop

• Suitable for vacuum up to 10-6 hPa • Very compact due to folded drive • Noncontact reference and limit switches Compact linear stage, versatile in use Linear stage with compact size due to folded drive with belt drive. Clear aperture with 10 mm Ø. XY setups can be mounted directly without adapter plate. Drive • Backlash-compensated leadscrew Application fields Vacuum chambers. Research. Beamline instrumentation. Microscopy. Electronics assembly and inspection. Reduced outgassing especially for use in vacuum environments Most notably, for the lubrication of the guides and the drive screw a material with particularly low outgassing is used. Therefore, a bakeout temperature of up to 80 °C can be reached. With this and other modifications of the PI V6 vacuum class, this positioner can be used up to 10-6 hPa. Position measuring • Rotary encoder on the motor shaft • Noncontact Hall effect reference and limit switches