Air bearing stage A-121 PIglide AT1 series

linearlinear motor-drivenmulti-axis

• Ideal for scanning applications or high-precision positioning • Cleanroom compatible • Size of the motion platform 115 mm × 115 mm • Low profile from 60 mm • Resolution to 1 nm Product overview The stages in the PIglide are equipped with a servo drive linear motor with preloaded air bearings and integrated linear encoder. The combination of these noncontact components results in a frictionless motion platform that offers the highest performance, quality, and lifetime. A high-force linear motor can drive the stage to top speed within a few milliseconds. The preloaded air bearing construction supports mounting in any orientation. Accessories and options Encoder PIglide filter and air preparation kits Multi-axis motion controller and direct drives XY setups and individual configurations Cable track variations Counterbalance options for vertical assembly Base plates made of granite and systems for reducing vibration Application fields PIglide positioning systems are ideally suited for many high-precision applications such as metrology, photonics, and precision scanning in semiconductor or flat panel display manufacturing. Thanks to the friction-free motion, no particles are formed, which makes PIglide stages ideal for cleanroom applications.