Air bearing stage A-110 PIglide LC series

linearlinear motor-drivenhigh-accuracy

• Ideal for scanning applications or high-precision positioning • Cleanroom compatible • Size of the motion platform 160 mm × 200 mm • Load capacity to 100 N PIglide positioning systems have a magnetic linear motor, magnetically preloaded air bearings and an optical linear encoder: Noncontact and friction-free motion for the highest accuracy and reliability • Encoder • PIglide Filter and Air Preparation Kits • Single and multi-axis motion controller • XY setups and individual configurations • Base plates made of granite and systems for reducing vibration Application fields PIglide positioning systems are ideally suited for many high-precision applications such as metrology, photonics, and precision scanning in semiconductor or flat panel display manufacturing. Thanks to the friction-free motion, no particles are formed, which makes PIglide stages ideal for cleanroom applications.