- Robotics - Automation - Industrial IT
- Automation
- Production automation system
- RoboTechnik Intelligent Technology Co., Ltd.
Production automation system RTA-DIA30000HP-R/Lprocess
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Characteristics
- Options
- for production, process
Description
● Apply to 156/230 size wafers
● Compatible to different brands of wafer diffusion equipment and different sizes of quartz boat
Features :
● Loading and unloading: Cassette
● Output: quartz boat
● Optional online square resistance,detection, hydrophilicity test, missing piece detection, and water piece detection
● Optional support MES interface and remote debug function
● OEE statistics & Energy consumption analysis
● Ceramic sucker, ceramic quick insert top gear
● Standard ion split air knife
● Optional support MES function and remote diagnosis function
● Optional smart IGV interface
● Intelligent machine, OEE statistics and energy consumption analysis function
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*Prices are pre-tax. They exclude delivery charges and customs duties and do not include additional charges for installation or activation options. Prices are indicative only and may vary by country, with changes to the cost of raw materials and exchange rates.