vertical stage / piezoelectric / 3-axis / closed-loop

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vertical stage / piezoelectric / 3-axis / closed-loop vertical stage / piezoelectric / 3-axis / closed-loop - SHL-3D5N-5


  • Orientation:


  • Type:


  • Number of axes:


  • Other characteristics:

    compact, aluminum, vacuum-compatible, closed-loop, for heavy loads

  • Stroke :

    3 mm (0.118 in)

  • Speed:

    0.005 m/s (0.016404199 ft/s)


A 3DoF positioning system that can lift high payloads of up to 5 N over a range of 5 mm regardless of its mounting orientation

Linear stages of the SHL Series are specially designed to handle heavy loads. The mechanical design is based on an actuated wedge which guarantees highest resolution of the stages motion. A separate guideway assures a straight movement along the load direction and allows an integration of a position sensor for direct position feedback and closed loop operation. Stages which are intended for pure vertical motion to lift components or equipment can be equipped with an additional constant force spring to offset the payload
to even higher values. Accordingly, nano-encoded stages which can lift up to 10 kilogramms over several millimeter are possible as well as multi-axis systems based on linear stages of the SHL Series which offer high blocking forces in all three dimensions.
While offering high payloads, SmarAct SHL stages remain very compact and are suitable also for setups with space contraints
Degrees of Freedom3
Travel [mm]3
Max. Lift Force [N]5 (in all directions)
Dimensions [mm]100 x 140 x 40
Weight [g]650
Velocity [mm/s]> 5
Resolution [nm]< 1
Closed-Loop Resolution MCS2 [nm]1 (S), 4 (L)
Closed-Loop Repeatability, Full Stroke MCS2 [nm]100 (S), 200 (L)
Closed-Loop Resolution (H)CU [nm]500 (L)
Closed-Loop Repeatability, Full Stroke (H)CU [nm]± 1000 (L)
Material OptionsAluminum as standard; Steel base (-ST); Titanium base (-TI); Black anodized (-BK)
Vacuum OptionsHV (1E-6 mbar); UHV / UHVT (1E-11 mbar)