Tripod positioning system TRIPOD 52-6DoF

XYvacuum

The TRIPOD 52-6DoF is compatible with the CLS-52 Modular System and consists of a tip-tilt stage, like its larger equivalent, the TRIPOD 92-6DoF The arrangement of the three turrets allows a roll and pitch motion of the top plate in the range of ±8.5° for Θx, ±9.5° for Θy and a linear translation in the Z direction of 5 mm. The top plate includes a mounting slot for a SR-3211 rotation stage to add a fourth degree of freedom to the setup. The bottom plate on the contrary allows a direct mounting to a breadboard or a XY platform consisting of two CLS-52 linear translation stages. The later possibility yields to a 5D or together with the SR-3211 to a 6D positioning system. Mechanical Travel [mm] - 31 (X); 31 (Y); 5 (Z) Travel [ - 17 (Θx); 19 (Θy); unlimited (Θz) Max. Normal Force [N] - 5 Max. Horizontal Force [N] - 2.5 Dimensions [mm] - 90 x 90 x 80 Height of Platform above Ground [mm] - 80 Weight [g] - ~ 550 Closed-Loop Sensor Types - S Smallest Increment [nm] - 1 Smallest Increment [µrad] - 1 Closed-Loop Repeatability, Full Stroke MCS2 [nm] - < ± 200 Closed-Loop Repeatability, 1 mm Travel MCS2 [nm] - < ± 10 Closed-Loop Repeatability, Full Stroke MCS2 [µrad] - < ± 15 Options Vacuum Options - HV (1E-6 mbar); UHV / UHVT (1E-11 mbar) Non-Magnetic Option - Yes (-NM)