Displacement measurement interferometer PICOSCALE V2

laseropticalhigh-accuracy

High precision contactless measurement of displacements For the high precision measurement of displacements, SmarAct provides the PICOSCALE interferometer. - 3 parallel laser interferometers in one instrument for 3D measurements - Measurement bandwidth up to 2.5 MHz (10 MHz sample rate) with a resolution down to 1 pm1 - Measurements possible on most materials (plastic, glass, metal and even water) - Wide range of sensor heads available for different applications and environments (including vacuum and cryogenics) - Extendable to a complete laboratory measurement and control instrument with optional modules - Proven performance with 100s of satisfied customers 1 When analysing periodic displacements in the frequency domain Application Examples High resolution optical displacement measurements of a piezo scanner Precise positioning of samples is of paramount interest in a variety of applications. While positioning systems with stick-slip piezo technology offers versatile possibilities, the slip-behavior is undesired in some applications. In that case, piezo scanners show their full potential as they can position a sample very accurately over a range of a few micro meters. In this application note, the steps of a piezo scanner are verified. In closed-loop operation using an optical encoder as sensor, a PICOSCALE Interferometer is employed to reveal single-nanometer steps. Straightness measurements of translation stages Straightness measurements of translation stages are one of the typical applications for the PICOSCALE Interferometer.