- Hydraulics - Pneumatics
- Valve
- Gas pressure regulator and reducer
- SMC Corporation of America
Gas pressure regulator and reducer AP500 seriesdiaphragmsingle-stagestainless steel
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Characteristics
- Product
- for gas
- Technology
- diaphragm
- Number of stages
- single-stage
- Material
- stainless steel, Hastelloy®, in semiconductor
- Applications
- industrial, UHP
- Other characteristics
- compact, high-flow, corrosion-resistant
- Pressure
Min.: 3,400 Pa
(0.49 psi)Max.: 700,000 Pa
- Flow
15 l/min, 30 l/min
(3.96 us gal/min, 7.93 us gal/min)- Temperature
Min.: -40 °C
(-40 °F)Max.: 71 °C
(159.8 °F)
Description
Series AP is an ultra high purity (UHP) regulator for gas delivery in semiconductor and other clean industries. The series is available in low to high flow capacities, with some models offering a tied-diaphragm design. Available options include Hastelloy® internals for corrosion resistance, a tube stub weld fitting connection type, and various surface finishes.
• Flow capacity: standard to 15 slpm; HF (option) to 30 slpm
• Sub-atmospheric pressure delivery option
Catalogs
AP Ultra High Purity
25 Pages
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*Prices are pre-tax. They exclude delivery charges and customs duties and do not include additional charges for installation or activation options. Prices are indicative only and may vary by country, with changes to the cost of raw materials and exchange rates.