Vacuum vacuum switch P1204

piezoresistiveflangeindustrial

Overview
A complete range of components and equipment for vacuum and sputtering systems, developed by Socrate Industrie for chamber isolation, pressure control and motion transmission through vacuum enclosures.

Products listed

• Vacuum switch: Detects presence or loss of vacuum at the connection point; suitable for electrical control and interlock functions.
• Specific gate valves: Heated gate valves for reliable chamber isolation in cluster and process tools.
• Exhaust valve: Pressure-relief/exhaust valves to protect chambers by controlling overpressure.
• Cathodes: Magnetron cathodes designed for sputtering deposition systems.
• Rotary feedthroughs: Rotary motion feedthroughs that transmit rotation through vacuum housings.

Available documentation (titles only)

• V-Switch (documentation)
• Gate valve (documentation)
• Safety valve (documentation)
• Magnetron (documentation)
• Feedthroughs (documentation)

Technical specifications

• Brand: Socrate Industrie
• Product types: Vacuum switch, heated gate valves, exhaust/safety valves, magnetron cathodes, rotary feedthroughs
• Applications: Vacuum systems, sputtering systems, chamber isolation in cluster tools, rotary motion transmission through vacuum enclosures
• Documentation: PDF files available for each product
• Page type: Product range / components listing