Product name Heated pneumatic gate valves
Description Heated valves designed for chamber isolation in cluster systems. These are custom-developed pneumatic gate valves with thermalization to prevent condensation and maintain process temperature.
Highlights- Heated gate valve for vacuum chamber isolation
- Pneumatic automatic actuation (custom development)
- Designed for cluster system integration
- Thermalization indicated (image filename suggests 150°C operation)
Documentation Technical documentation (PDF) available from the manufacturer.
Technical characteristics- Type: Heated gate valve
- Function: Chamber isolation in cluster systems
- Actuation: Pneumatic automatic
- Customization: Developed on request by Socrate Industrie
- Thermalization / indicated max temperature: 150°C (as referenced in image filename)