Electronic vacuum coating machine Sybilla

Overview
Range of machines for the deposition of ultra-thin parylene coatings. The Sybilla series is developed for parylene deposition by CVD, offering custom solutions adapted to a variety of process requirements and industrial applications.

Technologies and systems

• Parylene deposition technologies developed in partnership with Coat-X.
• Low-temperature deposition systems for coating electronic, medical or semiconductor devices: CX-30/300/600.
• Innovative hybrid multilayer Parylene–ALD deposition system: CXC-20.
• Optional ALD module and PVD module connected via an automated transfer system.

Functions and applications

• Ultrathin protective coatings for electronic components, medical devices and semiconductor substrates.
• Capabilities for multilayer deposits and co-deposition (hybrid Parylene + ALD).
• Low-temperature operation suitable for temperature-sensitive substrates.

Documentation
Technical documentation and product brochure available for download from the product page (PDF file).

Characteristics / technical specifications

• Series: Sybilla.
• Models/systems mentioned: CX-30 / CX-300 / CX-600 (noted as CX-30/300/600); CXC-20 (hybrid Parylene - ALD).
• Technology: parylene deposition by CVD; hybrid Parylene + ALD solution.
• Optional modules: ALD module, PVD module, automated transfer between modules.
• Operating temperature: low-temperature (suitable for sensitive substrates).
• Target applications: electronics, medical, semiconductors.