Vacuum: all ranges HV up to 10-11 mbar
Lubrication liquid up to 10-8 mbar
Max. Bakeout temperature: 100°C
Optionally configurable:
• Available in magnetic and low magnetic versions
• Material selection and vacuum lubrication adapted to the application
• Individual adaptation to the installation situation in the chamber
• Version for clean room ISO 14644-1 (up to class 1 on request)
• Optional with controller FMC400/450
High-resolution imaging under limited installation space
This compact and flat rotary stage achieves extremely high resolutions in vacuum during fast processes. The 36 mm transmitted light allows precise positioning, measurement and analysis of small samples. It can be combined into demanding multi-axis systems and is easily controlled by our FMC 400/450 controllers.
Fields of application
High precision and dynamic microscopy e.g. AFM, electron microscope, ion microscope, scanning electron microscope, scanning tunneling microscope, laboratory microscopy, imaging systems, sample analysis, beamline instrumentation, synchrotron, material research, material analysis