Perfectly integrated multi-sensor systems
The VideoCheck® HA is the highly accurate variant of the VideoCheck® FB and can also be equipped with several independent sensor axes. In the patented Raster Scanning HD operating mode, single images captured during movement are superimposed to form an overall image with a resolution of up to 20,000 megapixels, allowing fast measurements "on the image" with high accuracy. The VideoCheck® HA is also ideal for other highly accurate sensors such as the patented Werth Fiber Probe® and has a wide range of applications. SEMI certification is possible for the semiconductor industry.
• If the specified length measurement error is adhered to, the air bearing granite measuring stage can be loaded with up to 100 kg or optionally with 250 kg
• For measurements on particularly heavy workpieces, it is possible to remove the transmitted light unit
• Independent sensor axes allow optimal utilisation of the measuring range, for example, the SP80 tactile sensors and a rotary/tilt head can be interchanged with the SP25 3D scanning probe on the same ram, while the second ram is equipped with optical and tactile-optical multi-sensor systems
• Reduction of the risk of collision between sensors and workpiece
• A second ram can also be retrofitted at a later date
• Accuracy
Permissible length measurement error up to 0.25 µm