Perfectly integrated multi-sensor systems for laboratory applications
Thanks to special air bearing technology, integrated vibration insulation, temperature-stable scale and drive systems and a high-performance control system, the achievable length measurement errors of the highly accurate (ultra accuracy) multi-sensor coordinate measuring machine are in the range of a few tenths of a µm. The main applications are precision workpieces and 3D micro-geometries.
• Accuracy-optimised, solid granite construction with fixed bridge
• Measuring volume of 400 mm x 400 mm x 250 mm unique in this machine class
• Highly accurate optical measurement with telecentric precision optics and powerful contour image processing
• Integration of additional highly accurate sensors such as the patented tactile-optical micro-probe Werth Fiber Probe® or the Chromatic Focus Point sensor
• Highly accurate measurement in the Z-axis due to fast contrast autofocus
Accuracy
Permissible length measurement error up to 0.15 µm
• Turned parts
• Springs
• Contact lenses and molds
• Plastic optics
• LED arrays
• Mirrors / Optical filters
• Spinnerets
• Plug connections
• Ring and bevel gears
• Deep drawing and punching tools
• Wafer