The ECB series are high voltage amplifiers for electrostatic suction cups (E-Chuck, ESC). In addition to polarity switching and forced grounding, the family also offers a wafer monitoring system to meet wafer inspection needs. In addition, with a wide voltage range, the series supports Coulomb and Johnsen-Rahbek electrostatic suckers.
Application:
Electrostatically driven material handling
Semiconductor wafer processing
Non-mechanical transfer of plates or other processed materials that are sensitive to mechanical handling