High-accuracy stage XLS-1 Precision Series
linearpiezovacuum-compatible

high-accuracy stage
high-accuracy stage
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Characteristics

Orientation
linear
Type
piezo
Other characteristics
high-accuracy, vacuum-compatible, with sub-nanometer resolution
Stroke

Min.: 27 mm
(1.063 in)

Max.: 102 mm
(4.016 in)

Speed

Min.: 0 mm/s

Max.: 200 mm/s

Description

The Xeryon Linear Stage (XLS) is a precise linear stage driven by a noiseless ultrasonic piezo motor. This allows fast positioning with nanometre accuracy. The self-locking piezo motor holds the position of the stage when it is not powered. As a result, energy consumption and heat generation are considerably reduced. The integrated encoder has a resolution of 310 nm.

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*Prices are pre-tax. They exclude delivery charges and customs duties and do not include additional charges for installation or activation options. Prices are indicative only and may vary by country, with changes to the cost of raw materials and exchange rates.