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... The OBS-ONE PN unit is an on-board emissions measurement system for analyzing the solid particle number concentration within the specified particle size range under real-world driving conditions. The unit uses a condensation ...
... situ wafer temperature measurement systems, available in both 300mm and 200mm configurations, captures the effects of the plasma etch process environment on production wafers under real process conditions. The EtchTemp-HD ...
KLA Corporation
... series of in situ wafer temperature measurement systems, available in both 300mm and 200mm configurations, is designed to optimize and monitor advanced film processes (FEOL and BEOL ALD, CVD and PVD) and other elevated ...
KLA Corporation
... wafer temperature measurement system, available in both 300mm and 200mm configurations, supports monitoring of wet clean and other wet processes. The WetTemp series monitor wafers are compatible with most single wafer ...
KLA Corporation
... The MaskTemp 2 in situ reticle temperature measurement system is used by mask shops for qualification and monitoring of e-beam writers and high temperature reticle process steps. The ...
KLA Corporation
... The SensArray® Automation in situ process management package provides a fast automated collection of process tool chamber temperature measurements while also providing semi-automated functionality to support fab startups. The SensArray ...
KLA Corporation
... Name: Temperature measuring board ERP Code: 222005026 Specification: DT6.672.010A03 Used in: 5E-C5500 Automatic Calorimeter, 5E-C5508 Automatic Calorimeter, 5E-AC/PL Calorimeter ...