For generating high and ultra-high vacuums SST turbomolecular pumps are
equipped with an integrated low vacuum stage.
Dry, solid-lubricated hybrid bearings with ceramic balls prevent the vacuum
being contaminated by oils, greases or their decomposition products.
The functional and design features are:
- Monobloc rotors with extremely low residual vibrations
- Special blade design for a high pumping speed and a high compression ratio, particularly for light gases
- The gap-free rotor structure gives fast degassing on the high vacuum side
- Fore-vacuum limiting pressure up to several mbars
- Oil free, so no self-generation of light gases from hydrocarbon cracking
products
- Any operating position
- Very quiet running, minimal noise level
- Maintenance free under normal operation
- Small dimensions, low weight
Leak detectors
Mass spectrometers
Electron beam microscopy
TV tube manufacturing
Load locks and transfer chambers
Technical Features
Compact design
Operation in any orientation
Cooling by convection is sufficient for most applications
Air and water cooling can be added easily
Oil-free pump for generating clean high- and ultrahigh-vacuum conditions
Advantages to the User
Space-saving
Easy to integrate into complex vacuum systems
Low operating costs
Highly reliable operation also in processes loaded with particles
4 PUMPS designed for semiconductor processes
Description Applications
Adixen maglev hybrid turbomolecular pumps
5 corrosion proof features
- Automatic balancing system
- Built-in 75°C heating system
- 5 active axes
- Inert gas purge
- Inverted dynamic seal (only for ATH400 and ATH 1300)
High throughput applications
ATH 400 M, ATH 1300 M,ATH 1600 M and ATH 2300 M are designed for high pressure, high throughput pumping needed for semiconductor and other thin film coating applications.
A compact and modern design
- Adjustable rotational speed for optimizing pumping parameters
- Very high MTBF
- Low cost of ownership
- Low noise and vibration levels
- Battery free
... see all the products in the category
Vacuum pumps
